Download Advanced scanning microscopy for nanotechnology techniques by Weilie Zhou PDF

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By Weilie Zhou

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How It Works? EBSD operates by arranging a flat, highly polished (or as-deposited thin film) sample at a shallow angle, usually 20˚, to the incident electron beam (Fig. 7) (since the SEM stage is often used to tilt the plane of the sample to this shallow angle, the value of stage tilt is often referred to and is typically 70˚). With an 2. 7. Schematic arrangement of sample orientation in the SEM. ) accelerating voltage of 10–30 kV, and incident beam currents of 1–50 nA, electron diffraction occurs from the incident beam point on the sample surface.

The main drawback with this arrangement, also evident from Fig. 22a, is that the detector will be bombarded not only by the SE1 and SE2 secondary electrons from the specimen carrying the desired specimen information, but also by BSEs from the specimen, and by tertiary electrons (SE3) created by BSE impact on the lens and the chamber walls. Typically at least half of the signal into the detector is from direct backscatters or in the form of SE3 generated by scattering in the sample area. As a result the fraction of SE content from the sample is diluted, the signal-to-noise ratio is degraded, and image detail is reduced in contrast.

Chemistry, electronic properties, and charge) and less sensitive to topography, while the in-chamber detector has the opposite traits. In the highest resolution SEMs (including TEMs equipped with a scanning system) the specimen is physically inside the lens and is completely immersed within the magnetic field of the lens, so the only access to the SE signal is to collect it using the lens field [11] as shown in Fig. 22c. The properties of this detector will be the same as those of the TTL detector described above, but in this configuration there is no opportunity to insert an ET detector at the level of the specimen.

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